Sulphur Hexafluoride (SF6) Â
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sulphur hexafluoride sf6
Sulfur hexafluoride is a colorless in-noxious and non-flammable gas at atmospheric temperature. With excellent electric insulating and arc-quenching capacity, sulfur hexafluoride gas has been widely used in the fields of electric, laser, medical, meteorological, freezing, fire-fighting, chemical, military, space aviation, nonferrous metallurgy and physical research etc.
In semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high density plasma etching without generating carbon by-products. SF6 can be used for etching metal silicides (specially tungsten etchback) , nitrides and oxides versus their metal substrates. In other industries, Sulfur hexafluoride is a insulating material used as a dielectric in electrical transformers. SF6 can be used as a inert blanketing agent. SF6 is a tracer gas for determining ventilation rates and air movements in buildings